Version 1.2
The four class definitions in this toolbox provide a simple, versatile, and scriptable means of generating patterns for Raith electron-beam lithography (EBL) and focused ion beam (FIB) tools using MATLAB.
The Raith_GDSII MATLAB Toolbox is currently maintained by the University of Alberta nanoFAB Centre. Versions 1.1 and earlier were developed at the (former) National Institute for Nanotechnology, a joint initiative between the University of Alberta, the Government of Canada, the Government of Alberta, and the National Research Council Canada.
- Generate Raith-dialect GDSII hierarchy (.csf) and positionlist (.pls) files directly within MATLAB
- Plot patterns in MATLAB using Raith dose factor colouration, from individual GDSII elements to entire positionlists
- Full support for Raith curved elements (circles, ellipses, arcs)
- Full support for Raith "fixed beam moving stage" exposure elements (paths and circles) (new in v. 1.2)
- Simply-connected font defined to use for text elements
- Export pattern in plain GDSII (Raith-specific elements converted to polygons and paths), to use with non-Raith GDSII editors
This toolbox has been tested with MATLAB R2010a and later; use with earlier versions of MATLAB is at your own risk.
To install, simply place the four class definitions found in the src directory (Raith_element.m, Raith_structure.m, Raith_library.m, and Raith_positionlist.m) into a folder on your MATLAB path.
Please refer to the online documentation for a quick-start guide, tutorial examples, and a full description of the class definitions.
This toolbox is subject to the terms of the Mozilla Public License, v. 2.0.