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Deep Trench Minimum Feature Size Different than M1 Layer #11

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davinbirdi opened this issue Jul 31, 2023 · 0 comments

davinbirdi commented Jul 31, 2023

Not sure if this is intended, but I'd like to bring it up if it's missing. I am assuming the lithography is done also with a Heidlberg MLA system.

I get DRC Violations for this structure using M1 Layer, but for the same structure on the Deep Trench Layer I do not get any.

Would like to verify if it is indeed missing.

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