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Filler scripts hotfix to the main #260

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Nov 12, 2024
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should be changed to EdgeSeal.boundary

Original file line number Diff line number Diff line change
Expand Up @@ -21,7 +21,7 @@

# total area limited by prBoundary
# HACK: use 235/4 since we currently have no prBoundary (189/0) drawn
prBoundary = input("235/4")
prBoundary = input("39/4")


# Activ
Expand Down
232 changes: 232 additions & 0 deletions ihp-sg13g2/libs.tech/klayout/tech/macros/sg13g2_filler_ActGatP.lym
Original file line number Diff line number Diff line change
@@ -0,0 +1,232 @@
<?xml version="1.0" encoding="utf-8"?>
<klayout-macro>
<description>Fill Activ/GatPoly</description>
<version>0.1</version>
<category>filler</category>
<prolog/>
<epilog/>
<doc/>
<autorun>false</autorun>
<autorun-early>false</autorun-early>
<priority>0</priority>
<shortcut/>
<show-in-menu>true</show-in-menu>
<group-name>filler</group-name>
<menu-path>sg13g2_menu&gt;end("SG13G2 PDK").end</menu-path>
<interpreter>dsl</interpreter>
<dsl-interpreter-name>drc-dsl-xml</dsl-interpreter-name>
<text>
# Automatic filler generation script for Active/GatPoly
Activ = source.input("1/0")
Activ_pin = source.input("1/2")
Activ_mask = source.input("1/20")
Activ_filler = source.input("1/22")
Activ_nofill = source.input("1/23")
BiWind = source.input("3/0")
GatPoly = source.input("5/0")
GatPoly_pin = source.input("5/2")
GatPoly_filler = source.input("5/22")
GatPoly_nofill = source.input("5/23")
Cont = source.input("6/0")
nSD = source.input("7/0")
nSD_block = source.input("7/21")
Metal1 = source.input("8/0")
Metal1_pin = source.input("8/2")
Metal1_filler = source.input("8/22")
Metal1_nofill = source.input("8/23")
Metal1_slit = source.input("8/24")
Passiv = source.input("9/0")
Metal2 = source.input("10/0")
Metal2_pin = source.input("10/2")
Metal2_filler = source.input("10/22")
Metal2_nofill = source.input("10/23")
Metal2_slit = source.input("10/24")
BasPoly = source.input("13/0")
pSD = source.input("14/0")
DigiBnd = source.input("16/0")
Via1 = source.input("19/0")
RES = source.input("24/0")
SRAM = source.input("25/0")
TRANS = source.input("26/0")
IND = source.input("27/0")
SalBlock = source.input("28/0")
Via2 = source.input("29/0")
Metal3 = source.input("30/0")
Metal3_pin = source.input("30/2")
Metal3_filler = source.input("30/22")
Metal3_nofill = source.input("30/23")
Metal3_slit = source.input("30/24")
NWell = source.input("31/0")
NWell_pin = source.input("31/2")
nBuLay = source.input("32/0")
nBuLay_block = source.input("32/21")
EmWind = source.input("33/0")
DeepCo = source.input("35/0")
MIM = source.input("36/0")
EdgeSeal = source.input("39/0")
dfpad = source.input("41/0")
dfpad_pillar = source.input("41/35")
dfpad_sbump = source.input("41/36")
ThickGateOx = source.input("44/0")
PWell = source.input("46/0")
PWell_block = source.input("46/21")
Via3 = source.input("49/0")
Metal4 = source.input("50/0")
Metal4_pin = source.input("50/2")
Metal4_filler = source.input("50/22")
Metal4_nofill = source.input("50/23")
Metal4_slit = source.input("50/24")
EmPoly = source.input("55/0")
DigiSub = source.input("60/0")
TEXT_0 = source.labels("63/0")
Via4 = source.input("66/0")
Metal5 = source.input("67/0")
Metal5_pin = source.input("67/2")
Metal5_filler = source.input("67/22")
Metal5_nofill = source.input("67/23")
Metal5_slit = source.input("67/24")
Polimide = source.input("98/0")
Recog = source.input("99/0")
Recog_esd = source.input("99/30")
Recog_diode = source.input("99/31")
Recog_tsv = source.input("99/32")
EXTBlock = source.input("111/0")
TopVia1 = source.input("125/0")
TopMetal1 = source.input("126/0")
TopMetal1_pin = source.input("126/2")
TopMetal1_filler = source.input("126/22")
TopMetal1_nofill = source.input("126/23")
TopMetal1_slit = source.input("126/24")
PolyRes = source.input("128/0")
Vmim = source.input("129/0")
TopVia2 = source.input("133/0")
TopMetal2 = source.input("134/0")
TopMetal2_pin = source.input("134/2")
TopMetal2_filler = source.input("134/22")
TopMetal2_nofill = source.input("134/23")
TopMetal2_slit = source.input("134/24")
ColWind = source.input("139/0")
RFMEM = source.input("147/0")
DeepVia = source.input("152/0")
LBE = source.input("157/0")
NoMetFiller = source.input("160/0")

# Fill exclusion area

cellframe1 = EdgeSeal.holes

##########################################################################
# CREATE DUMMY FILL PATTERNS FOR ALL LEVELS
##########################################################################

# Active fill pattern
act_fill = fill_pattern("Act_FILL_CELL")
width = 3.4
length = 3.4
spacing_h = width + 1.6
spacing_v = length + 1.6
offset_h = 0
offset_v = 2.5
act_fill.shape(1, 22, box(0, 0, width, length))

# GatPoly fill pattern
gp_fill = fill_pattern("GatP_FILL_CELL")
gp_width = 5
gp_length = 1.4
gp_spacing_h = gp_width + 5
gp_spacing_v = gp_length + 1.1
gp_offset_h = 5
gp_offset_v = 0
gp_fill.shape(5, 22, box(0, 0, gp_width, gp_length))

act_fill.origin(-0.8, 0)
act_fill.dim(5, 3.4)

gp_fill.origin(0, -1)
gp_fill.dim(5, 3.4)

##########################################################################
# CREATE Activ FILLER
##########################################################################

extent_all_layers = source.extent
Activ_cpy=Activ.dup
Poly_cpy=GatPoly.dup
Cnt_cpy=Cont.dup
TRANS_cpy=TRANS.dup
NWell_cpy=NWell.dup
NWell_cpy2=NWell.dup

sep=1.1 ### AFil.c
Poly_cpy.size(sep,sep, "square_limit")
Cnt_cpy.size(sep,sep, "square_limit")
AFil_c = Poly_cpy | Cnt_cpy

sep=0.42 ### AFil.c1
Activ_cpy.size(sep,sep, "square_limit")
AFil_c1 = Activ_cpy

sep=1.0 ### AFil.e
TRANS_cpy.size(sep, sep, "square_limit")
AFil_e = TRANS_cpy

sep=1.0 ### AFil.d
NWell_cpy.size(sep, sep, "square_limit")
NWell_cpy2.size(-sep, -sep, "square_limit")
AFil_d = NWell_cpy - NWell_cpy2

exclLayAct = AFil_c | AFil_c1 | AFil_e | AFil_d

##########################################################################
# CREATE GatPoly FILLER
##########################################################################

Activ_gp_cpy=Activ.dup
Poly_filler_cpy=GatPoly_filler.dup
Poly_gp_cpy=GatPoly.dup
Cnt_gp_cpy=Cont.dup
TRANS_gp_cpy=TRANS.dup
NWell_gp_cpy=NWell.dup
NWell_gp_cpy2=NWell.dup
pSD_cpy = pSD.dup
nSD_block_cpy = nSD_block.dup
SalBlock_cpy = SalBlock.dup

sep=0.8 ###GFil.c
Poly_filler_cpy.size(sep, sep, "square_limit")
GFil_c = Poly_filler_cpy

sep=1.1 ###GFil.d
Activ_gp_cpy.size(sep, sep, "square_limit")
Poly_gp_cpy.size(sep, sep, "square_limit")
Cnt_gp_cpy.size(sep, sep, "square_limit")
pSD_cpy.size(sep, sep, "square_limit")
nSD_block_cpy.size(sep, sep, "square_limit")
SalBlock_cpy.size(sep, sep, "square_limit")
GFil_d = Activ_gp_cpy | Poly_gp_cpy | Cnt_gp_cpy | pSD_cpy | nSD_block_cpy | SalBlock_cpy

sep=1.1 ###GFil.f
TRANS_gp_cpy.size(sep, sep, "square_limit")
GFil_f = TRANS_gp_cpy

sep=1.1 ###GFil.e
NWell_gp_cpy.size(sep, sep, "square_limit")
NWell_gp_cpy2.size(-sep, -sep, "square_limit")
GFil_e = NWell_gp_cpy - NWell_gp_cpy2

exclLayGatP = GFil_c | GFil_d | GFil_f | GFil_e

ActoutGatP = exclLayGatP - exclLayAct
GatPoutAct = exclLayAct - exclLayGatP


# perform fill
#vstep=spacing_v
#hstep=spacing_h

org_x = 2000.0
org_y = org_x
(cellframe1-exclLayAct-exclLayGatP).fill(act_fill, hstep(spacing_h, offset_v), vstep(offset_h, spacing_v))
(cellframe1-exclLayGatP-exclLayAct).fill(gp_fill, hstep(gp_spacing_h, gp_offset_v), vstep(gp_offset_h, gp_spacing_v))
</text>
</klayout-macro>
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